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High Vacuum Molecular Pump (160mm Series)

Product Description

Material: Stainless Steel Valve Body Type: Butterfly Liquid Media: Viton Theory: Vacuum Pump Type: Blade Pump Origin: Shanghai, China Power: Electric Function: Intelligent Type Performance: Corrosion Structure: Single-Stage Pump Trademark: SUOTO HS Code: 8414100090 The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.
Model FF-160/500F FF-160/620C FF-160/700
Capacity(l/s) 500 600 700
H2 Compression Ratio 6× 10 3 6× 10 4 6× 10 6
N2 Compression Ratio 1× 10 9 1× 10 9 1× 10 9
Ultimate Pressure(Pa) ≤ 6× 10 -6 DN160 LF    ≤ 6× 10 -8 DN160 CF ≤ 6× 10 -7 DN160 LF    ≤ 6× 10 -8 DN160 CF ≤ 6× 10 -7 DN160 LF    ≤ 6× 10 -8 DN160 CF
Rotation Speed(RPM) 24000 36000 36000
Run up time(min) < 5 < 6 < 4
Inlet Flange KF40(DN40 ISO-KF) KF40(DN40 ISO-KF) KF40(DN40 ISO-KF)
Outlet Flange LF160(DN160 ISO-K)                        LF160(DN160 ISO-K)                        LF160(DN160 ISO-K)                       
Bearing standard Ceramic bearing Ceramic bearing
Backing pump(l/s) 4~8 4~8 4~8
Cooling water(º C) ≤ 25 ≤ 25 ≤ 25
Heating T(º C) ≤ 100 ≤ 100 ≤ 100
Ambient T(º C) 5~40 5~40 5~40
Oil filled(ml) 150 150 Grease lubricated
Install Orientation vertical± 5° vertical± 5° any
Weight(kg) 29 29 19

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Product Categories : Vacuum Pumps