High Vacuum Molecular Pump (200mm Series)
Product Description
Material: Stainless Steel Valve Body Type: Butterfly Liquid Media: Viton Theory: Vacuum Pump Type: Blade Pump Origin: Shanghai, China Power: Electric Function: Intelligent Type Performance: No Leak Structure: Single-Stage Pump Trademark: SUOTO HS Code: 8414100090 The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.
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The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.
Model | FF-200/1200C | FF-200/1300 |
Capacity(l/s) | 1200 | 1300 |
H2 Compression Ratio | 6× 10 3 | 6× 10 3 |
N2 Compression Ratio | 1× 10 9 | 1× 10 9 |
Ultimate Pressure(Pa) | ≤ 1× 10 -6 DN200 LF ≤ 1× 10 -7 DN200 CF | ≤ 6× 10 -6 DN200 LF ≤ 6× 10 -7 DN200 CF |
Rotation Speed(RPM) | 27000 | 24000 |
Run up time(min) | < 6 | < 6 |
Outlet Flange | KF40(DN40 ISO-KF) | KF40(DN40 ISO-KF) |
Inlet Flange | LF200(DN200 ISO-K) | LF160(DN160 ISO-K) |
Bearing | Ceramic bearing | Ceramic bearing |
Backing pump(l/s) | 15 | 15 |
Cooling water(º C) | ≤ 25 | ≤ 25 |
Heating T(º C) | ≤ 100 | ≤ 100 |
Ambient T(º C) | 5~40 | 5~40 |
Oil filled(ml) | 150 | Grease lubricated |
Install Orientation | vertical± 5° | any |
Weight(kg) | 39 | 29 |
Product Categories : Vacuum Pumps
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